Insights on capacitive interdigitated electrodes coated with MOF thin films: Humidity and VOCs sensing as a case study
Sapsanis, Christos; Omran, Hesham; Chernikova, Valeriya; Shekhah, Osama; Belmabkhout, Youssef; Buttner, Ulrich; Eddaoudi, Mohamed; Salama, Khaled N.;
Abstract
A prototypical metal-organic framework (MOF), a 2D periodic porous structure based on the assembly of copper ions and benzene dicarboxylate (bdc) ligands (Cu(bdc)·xH2 O), was grown successfully as a thin film on interdigitated electrodes (IDEs). IDEs have been used for achieving planar CMOS-compatible low-cost capacitive sensing structures for the detection of humidity and volatile organic compounds (VOCs). Accordingly, the resultant IDEs coated with the Cu(bdc)·xH2 O thin film was evaluated, for the first time, as a capacitive sensor for gas sensing applications. A fully automated setup, using LabVIEW interfaces to experiment conduction and data acquisition, was developed in order to measure the associated gas sensing performance.
Other data
Title | Insights on capacitive interdigitated electrodes coated with MOF thin films: Humidity and VOCs sensing as a case study | Authors | Sapsanis, Christos; Omran, Hesham ; Chernikova, Valeriya; Shekhah, Osama; Belmabkhout, Youssef; Buttner, Ulrich; Eddaoudi, Mohamed; Salama, Khaled N. | Keywords | Capacitive sensors | Gas sensor test setup | Humidity sensors | Interdigitated electrodes (IDEs) | Metal organic frameworks (MOFs) | Porous materials | Thin films | Volatile organic compounds (VOCs) | Issue Date | 24-Jul-2015 | Publisher | MDPI | Journal | Sensors (Switzerland) | ISSN | 14248220 | DOI | 10.3390/s150818153 | PubMed ID | 26213943 | Scopus ID | 2-s2.0-84937858726 | Web of science ID | WOS:000360906500016 |
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